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China's Reported EUV Lithography Prototype Challenges ASML Monopoly in Push for Chip Self-Reliance

Dec 17, 2025, 9:07 p.m. ET

China has reportedly completed a prototype Extreme Ultraviolet (EUV) lithography machine, a milestone that could reshape the global semiconductor landscape and challenge the long-standing dominance of Dutch chipmaking equipment supplier ASML Holding.

The development, first reported in early 2025, marks a major advance in Beijing’s state-backed drive to achieve semiconductor self-sufficiency, an effort often compared to a “Manhattan Project” for chips. If confirmed, the breakthrough would represent a critical step toward bypassing U.S.-led export controls that have restricted China’s access to the most advanced chipmaking tools, which are essential for producing cutting-edge semiconductors used in artificial intelligence, 5G networks and advanced military systems.

According to the reports, the prototype has succeeded in generating EUV light, a core technological requirement for manufacturing chips at the most advanced process nodes. However, it has not yet been used to produce functional chips, underscoring that China remains some distance from commercial deployment. Even so, analysts say the achievement is symbolically and strategically significant, signalling China’s determination to overcome one of the most formidable technological barriers in the semiconductor supply chain.

The project is said to be characterised by a high level of secrecy, heavy state funding and a “whole-of-nation” mobilisation of resources, reflecting Beijing’s broader push for technological self-reliance in the face of external pressure. For years, ASML has held an effective monopoly on EUV lithography machines, with sales tightly controlled by the Dutch government in coordination with U.S. export restrictions.

While major technical hurdles remain before China could field a commercially viable EUV system, the emergence of a prototype suggests that the country is narrowing the gap in one of the most complex and capital-intensive areas of chipmaking. Its progress could eventually alter the balance of power in the global technology industry, reducing China’s dependence on foreign suppliers and introducing a new variable into an already fragmented semiconductor market.

For now, the reported breakthrough serves as a signal of intent rather than a finished solution. But it underscores Beijing’s resolve to establish itself as a credible contender at the forefront of semiconductor innovation, despite mounting geopolitical and technological constraints.

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