Tesla shareholders on Thursday approved a massive new compensation plan for CEO Elon Musk that could be worth up to $1 trillion over the next decade — one of the largest pay packages in corporate history.

The vote comes despite criticism from some major investors who argued the plan was excessively large and misaligned with shareholder interests.

Under the plan, Musk — already the world’s richest person with a net worth of about $437 billion — would receive the full payout only if Tesla meets a series of ambitious performance milestones. Achieving those goals could make him the world’s first trillionaire.